- Patent Title: Three-dimensional memory devices and fabrication methods thereof
-
Application No.: US16238452Application Date: 2019-01-02
-
Publication No.: US10886294B2Publication Date: 2021-01-05
- Inventor: Jun Liu , Li Hong Xiao
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L27/11
- IPC: H01L27/11 ; H01L27/11582 ; H01L21/28 ; H01L27/1157 ; H01L27/11568

Abstract:
Embodiments of three-dimensional (3D) memory devices having a memory layer that confines electron transportation and methods for forming the same are disclosed. A method for forming a 3D memory device includes the following operations. An initial channel hole in a structure is formed. The structure includes a plurality first layers and a plurality of second layers alternatingly arranged over a substrate. An offset between a side surface of each one of the plurality of first layers and a side surface of each one of the plurality of second layers can be formed on a sidewall of the initial channel hole to form a channel hole. The channel hole with a channel-forming structure can be formed to form a semiconductor channel. The channel-forming structure can include a memory layer extending along a vertical direction. The plurality of second layers can then be replaced with a plurality of gate electrodes.
Public/Granted literature
- US20200168626A1 THREE-DIMENSIONAL MEMORY DEVICES AND FABRICATION METHODS THEREOF Public/Granted day:2020-05-28
Information query
IPC分类: