Invention Grant
- Patent Title: Semiconductor storage device
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Application No.: US16560606Application Date: 2019-09-04
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Publication No.: US10886295B2Publication Date: 2021-01-05
- Inventor: Yasuhito Nakajima
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Tokyo
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2019-049665 20190318
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L23/48 ; H01L27/1157

Abstract:
According to one embodiment, a semiconductor storage device includes a stacked body, a first columnar body, and a second columnar body. In the stacked body, a plurality of conductive layers and a plurality of insulating layers are alternately stacked along a first direction. The first columnar body extends through the stacked body. The second columnar body extends through the stacked body, and is aligned with the first columnar body along the first direction. The second columnar body includes a second channel film. The first columnar body includes a first channel film, a core surrounded by the first channel film, and a conductive layer. The conductive layer is in contact with the second channel film of the second columnar body and the first channel film of the first columnar body.
Public/Granted literature
- US20200303405A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2020-09-24
Information query
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