Invention Grant
- Patent Title: Vertical array of resistive switching devices having a tunable oxygen vacancy concentration
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Application No.: US16685194Application Date: 2019-11-15
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Publication No.: US10886334B2Publication Date: 2021-01-05
- Inventor: Takashi Ando , Choonghyun Lee
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Cantor Colburn LLP
- Agent Randall Bluestone
- Main IPC: H01L27/24
- IPC: H01L27/24 ; H01L45/00

Abstract:
Embodiments of the invention are directed to a vertical resistive device. A non-limiting example of the vertical resistive device includes a conductive horizontal electrode, an opening extending through the horizontal electrode, a filament region positioned within the opening and communicatively coupled to a sidewall of the horizontal electrode, and a conductive vertical electrode positioned within the opening and communicatively coupled to the filament region. The vertical electrode includes a first conductive alloy material. Oxygen vacancy formation in the filament region is controlled by the first conductive alloy material of the vertical electrode. A room temperature resistivity of the first conductive alloy material is below about 5×10−8 ohm meters and controlled by at least one of the metals that form the first conductive alloy material.
Public/Granted literature
- US20200091231A1 VERTICAL ARRAY OF RESISTIVE SWITCHING DEVICES HAVING A TUNABLE OXYGEN VACANCY CONCENTRATION Public/Granted day:2020-03-19
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