Invention Grant
- Patent Title: Power semiconductor device and manufacturing method thereof
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Application No.: US16429344Application Date: 2019-06-03
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Publication No.: US10886377B2Publication Date: 2021-01-05
- Inventor: Ju Hwan Lee , Tae Young Park , Hyuk Woo , Min Gi Kang , Young Joon Kim , Tae Youp Kim , Seong-hwan Yun , Seon-hyeong Jo , Jeong Mok Ha
- Applicant: HYUNDAI AUTRON CO., LTD.
- Applicant Address: KR Seoul
- Assignee: HYUNDAI AUTRON CO., LTD.
- Current Assignee: HYUNDAI AUTRON CO., LTD.
- Current Assignee Address: KR Seoul
- Agency: Morgan, Lewis & Bockius LLP
- Priority: KR10-2018-0071618 20180621
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/423 ; H01L29/06 ; H01L29/739

Abstract:
The power semiconductor device includes: a first trench gate and a second trench gate in a stripe shape extending in one direction in parallel and spaced apart from each other in a substrate; a third trench gate in a ladder shape extending in a direction different from the one direction between the first trench gate and the second trench gate in the substrate; a first conductive type body area each disposed between the first trench gate, the second trench gate and the third trench gate, respectively, in the substrate; a pair of first conductive type floating first areas surrounding each of bottom surfaces and at least one side of the first trench gate and the second trench gate in the substrate; and a first conductive type floating second area surrounding a bottom surface of the third trench gate in the substrate.
Public/Granted literature
- US20190393316A1 POWER SEMICONDUCTOR DEVICE AND MANUFACTURING METHOD THEREOF Public/Granted day:2019-12-26
Information query
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