Invention Grant
- Patent Title: Replacement gate structures for advanced integrated circuit structure fabrication
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Application No.: US17000615Application Date: 2020-08-24
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Publication No.: US10886383B2Publication Date: 2021-01-05
- Inventor: Byron Ho , Steven Jaloviar , Jeffrey S. Leib , Michael L. Hattendorf , Christopher P. Auth
- Applicant: Intel Corporation
- Applicant Address: US CA Santa Clara
- Assignee: Intel Corporation
- Current Assignee: Intel Corporation
- Current Assignee Address: US CA Santa Clara
- Agency: Schwabe, Williamson & Wyatt, P.C.
- Main IPC: H01L29/66
- IPC: H01L29/66 ; H01L29/78 ; H01L27/088 ; H01L21/762 ; H01L29/06 ; H01L21/8234 ; H01L21/768 ; H01L23/522 ; H01L23/532 ; H01L29/165 ; H01L29/417 ; H01L21/033 ; H01L21/28 ; H01L21/285 ; H01L21/308 ; H01L21/311 ; H01L21/8238 ; H01L23/528 ; H01L27/092 ; H01L27/11 ; H01L49/02 ; H01L29/08 ; H01L29/51 ; H01L27/02 ; H01L21/02 ; H01L29/167 ; H01L23/00

Abstract:
Embodiments of the disclosure are in the field of advanced integrated circuit structure fabrication and, in particular, 10 nanometer node and smaller integrated circuit structure fabrication and the resulting structures. In an example, an integrated circuit structure includes a fin. An isolation structure surrounds a lower fin portion, the isolation structure comprising an insulating material having a top surface, and a semiconductor material on a portion of the top surface of the insulating material, wherein the semiconductor material is separated from the fin. A gate dielectric layer is over the top of an upper fin portion and laterally adjacent the sidewalls of the upper fin portion, the gate dielectric layer further on the semiconductor material on the portion of the top surface of the insulating material. A gate electrode is over the gate dielectric layer.
Information query
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