Invention Grant
- Patent Title: Aluminum nitride film, acoustic wave device, filter, and multiplexer
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Application No.: US16001152Application Date: 2018-06-06
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Publication No.: US10886887B2Publication Date: 2021-01-05
- Inventor: Kuniaki Tanaka , Tokihiro Nishihara
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2017-123213 20170623,JP2018-089980 20180508
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H3/02 ; H03H9/13 ; H03H9/17 ; H03H9/56 ; H03H9/70
Abstract:
An aluminum nitride film contains a Group IV element and a Group II or Group XII element, and an atomic composition ratio of the Group II or Group XII element to the Group IV element is less than 1.
Public/Granted literature
- US20180375489A1 ALUMINUM NITRIDE FILM, ACOUSTIC WAVE DEVICE, FILTER, AND MULTIPLEXER Public/Granted day:2018-12-27
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