Invention Grant
- Patent Title: Optical inspection system
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Application No.: US15413431Application Date: 2017-01-24
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Publication No.: US10887500B2Publication Date: 2021-01-05
- Inventor: Changli Wu , Ying Liu
- Applicant: Hong Kong Applied Science and Technology Research Institute Co. Ltd.
- Applicant Address: CN Hong Kong
- Assignee: Hong Kong Applied Science and Technology Research Institute Co. Ltd.
- Current Assignee: Hong Kong Applied Science and Technology Research Institute Co. Ltd.
- Current Assignee Address: CN Hong Kong
- Agency: Norton Rose Fulbright US LLP
- Main IPC: H04N5/225
- IPC: H04N5/225 ; G06T7/00 ; G01N21/88

Abstract:
Optical inspection system detects defects of an object, such as an electronic device during manufacturing. The optical inspection system includes a first linear light source that irradiates a first light beam on a top surface of the object along a scan line across the width of the object. A second linear light source forms an angle with the first linear light source and irradiates a second light beam on a side surface of the object. A camera receives scattered light from the top surface and the side surface of the object and captures a subimage of the object along the scan line. An image processing system receives each subimage from the camera, stitches the subimages, and detects defects on the top surface and the side surface of the object.
Public/Granted literature
- US20180213134A1 Optical Inspection System Public/Granted day:2018-07-26
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