Invention Grant

Inspection device
Abstract:
An inspection device includes: an inspection pattern creating unit that creates an inspection pattern in which first regions each colored with a color different from each other and second regions each colored with a mixed color obtained by mixing at least two of colors with which the first regions are colored are alternately arranged; an irradiation unit that irradiates a surface of an inspection target with the inspection pattern while sliding the inspection pattern by a movement amount; a captured image acquisition unit that acquires a captured image obtained by imaging the surface of the inspection target irradiated with the inspection pattern; and a determination unit that generates color component images obtained by separating the acquired captured image for each of color components of the colors and determines whether or not there is a defect in the surface of the inspection target based on the color component images.
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