Invention Grant
- Patent Title: Purge gas feeding means, abatement systems and methods of modifying abatement systems
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Application No.: US16500665Application Date: 2018-03-28
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Publication No.: US10888817B2Publication Date: 2021-01-12
- Inventor: Andrew Seeley , Duncan Michael Price
- Applicant: Edwards Limited
- Applicant Address: GB Burgess Hill
- Assignee: Edwards Limited
- Current Assignee: Edwards Limited
- Current Assignee Address: GB Burgess Hill
- Agency: Westman, Champlin & Koehler, P.A.
- Agent Theodore M. Magee
- Priority: GB1705400.8 20170404
- International Application: PCT/GB2018/050844 WO 20180328
- International Announcement: WO2018/185469 WO 20181011
- Main IPC: B01D53/75
- IPC: B01D53/75 ; F23G7/06

Abstract:
A purge gas feeding means, an abatement system comprising such a means and a method of modifying an abatement system to include such a purge gas feeding means is disclosed. The purge gas feeding means comprises a plurality of paths running from an outer perimeter of the purge gas feeding means to an inner surface, the inner surface comprising a purge gas outlet for outputting the purge gas into the abatement system; wherein a cross sectional area of the plurality of paths increases from the outer perimeter to the inner surface such that a pressure of the purge gas falls flowing along the paths drops.
Public/Granted literature
- US20200061535A1 PURGE GAS FEEDING MEANS, ABATEMENT SYSTEMS AND METHODS OF MODIFYING ABATEMENT SYSTEMS Public/Granted day:2020-02-27
Information query
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