Invention Grant
- Patent Title: Ceramic laminate
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Application No.: US16081737Application Date: 2017-02-28
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Publication No.: US10889900B2Publication Date: 2021-01-12
- Inventor: Keisuke Tokuhashi , Keiichi Kimura , Tomohiro Uno , Yutaka Sato
- Applicant: NIPPON STEEL & SUMITOMO METAL CORPORATION
- Applicant Address: JP Tokyo
- Assignee: NIPPON STEEL & SUMITOMO METAL CORPORATION
- Current Assignee: NIPPON STEEL & SUMITOMO METAL CORPORATION
- Current Assignee Address: JP Tokyo
- Agency: Birch, Stewart, Kolasch & Birch, LLP
- Priority: JP2016-038555 20160301
- International Application: PCT/JP2017/007981 WO 20170228
- International Announcement: WO2017/150572 WO 20170908
- Main IPC: C04B35/593
- IPC: C04B35/593 ; C23C24/04 ; H01B1/02 ; H01B3/12 ; H01B5/14 ; C23C28/00 ; B32B15/04 ; H01L23/36

Abstract:
The present invention provides a ceramic laminate having excellent mechanical properties, heat dissipation property, insulating property, heat resistance and anti-reactivity, and particularly an insulative heat dissipating body having an excellent thermal cycle reliability and a high withstand voltage.
The ceramic laminate 1 according to the present invention is a ceramic laminate in which a ceramic film 3 is formed on a metal layer 2, wherein the ceramic film 3 has a minimum film thickness of 1 μm or more, contains silicon nitride and inevitable impurities, and has silicon nitride crystal grains having an average grain size of 300 nm or less in the film thickness direction and an average grain size of 500 nm or less in the in-plane direction. As a result, the present invention can provide a ceramic laminate having excellent mechanical properties, heat dissipation property, insulating property, heat resistance and anti-reactivity, and particularly an insulative heat dissipating body having an excellent thermal cycle reliability and a high withstand voltage.
The ceramic laminate 1 according to the present invention is a ceramic laminate in which a ceramic film 3 is formed on a metal layer 2, wherein the ceramic film 3 has a minimum film thickness of 1 μm or more, contains silicon nitride and inevitable impurities, and has silicon nitride crystal grains having an average grain size of 300 nm or less in the film thickness direction and an average grain size of 500 nm or less in the in-plane direction. As a result, the present invention can provide a ceramic laminate having excellent mechanical properties, heat dissipation property, insulating property, heat resistance and anti-reactivity, and particularly an insulative heat dissipating body having an excellent thermal cycle reliability and a high withstand voltage.
Public/Granted literature
- US20190062923A1 CERAMIC LAMINATE Public/Granted day:2019-02-28
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