Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16456387Application Date: 2019-06-28
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Publication No.: US10892273B2Publication Date: 2021-01-12
- Inventor: Sachiyo Ito , Ken Furubayashi , Hiroshi Yoshimura
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2019-018875 20190205
- Main IPC: H01L27/11578
- IPC: H01L27/11578 ; H01L27/11568 ; H01L27/11565

Abstract:
A semiconductor memory device of an embodiment includes a stacked body having a stepped portion in which a plurality of metal layers is stacked via an insulating layer, and end portions of the plurality of metal layers are formed in a stepwise manner, a plurality of columnar portions arranged in steps of the stepped portion and penetrating the stepped portion, and a band portion provided near a leading end portion of the metal layer of a lowermost step of the stepped portion, the band portion extending in a first direction along the leading end portion and dividing the stacked body and a peripheral region of the stacked body, in which a coverage of the columnar portions arranged in the lowermost step is larger than a coverage of the columnar portions arranged in an upper step adjacent to the lowermost step only in a second direction toward a region where memory cells are arranged.
Public/Granted literature
- US20200251484A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2020-08-06
Information query
IPC分类: