- Patent Title: Three-dimensional memory devices and fabricating methods thereof
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Application No.: US16163265Application Date: 2018-10-17
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Publication No.: US10892274B2Publication Date: 2021-01-12
- Inventor: Yushi Hu , Qian Tao , Haohao Yang , Jin Wen Dong , Jun Chen , Zhenyu Lu
- Applicant: Yangtze Memory Technologies Co., Ltd.
- Applicant Address: CN Hubei
- Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee: Yangtze Memory Technologies Co., Ltd.
- Current Assignee Address: CN Hubei
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: CN201711098604 20171109
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157

Abstract:
Embodiments of 3D memory devices and fabricating methods are disclosed. The method can comprise: forming an alternating dielectric stack on a substrate; forming a channel hole penetrating the alternating dielectric stack to expose a surface of the substrate; forming an epitaxial layer on a bottom of the channel hole; forming a functional layer covering a sidewall of the channel hole and a top surface of the epitaxial layer; forming a protecting layer covering the functional layer; removing portions of the functional layer and the protecting layer to form an opening to expose a surface of the epitaxial layer; expanding the opening laterally to increase an exposed area of the epitaxial layer at the bottom of the channel hole; and forming a channel structure on the sidewall of the channel hole and being in electrical contact with the epitaxial layer through the expanded opening.
Public/Granted literature
- US20190139982A1 Three-Dimensional Memory Devices and Fabricating Methods Thereof Public/Granted day:2019-05-09
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