- Patent Title: Three-dimensional memory devices and fabrication methods thereof
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Application No.: US16231479Application Date: 2018-12-22
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Publication No.: US10892276B2Publication Date: 2021-01-12
- Inventor: Jun Liu , Li Hong Xiao , Yu Ting Zhou
- Applicant: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Applicant Address: CN Wuhan
- Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee: YANGTZE MEMORY TECHNOLOGIES CO., LTD.
- Current Assignee Address: CN Wuhan
- Agency: Bayes PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/11568 ; H01L21/28 ; H01L21/311

Abstract:
Embodiments of three-dimensional (3D) memory devices having a memory layer that confines electron transportation and methods for forming the same are disclosed. A method for forming a 3D memory device includes the following operations. First, an initial channel hole can be formed in a structure. The structure can include a staircase structure. The structure can include a plurality first layers and a plurality of second layers alternatingly arranged over a substrate. An offset can be formed between a side surface of each one of the plurality of first layers and a side surface of each one of the plurality of second layers on a sidewall of the initial channel hole to form a channel hole. A semiconductor channel can then be formed based on the channel hole. Further, a plurality of gate electrodes can be formed based on the plurality of second layers.
Public/Granted literature
- US20200168625A1 THREE-DIMENSIONAL MEMORY DEVICES AND FABRICATION METHODS THEREOF Public/Granted day:2020-05-28
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