Invention Grant
- Patent Title: NAND string containing separate hole and electron tunneling dielectric layers and methods for forming the same
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Application No.: US16514019Application Date: 2019-07-17
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Publication No.: US10892279B1Publication Date: 2021-01-12
- Inventor: Yukihiro Sakotsubo
- Applicant: SANDISK TECHNOLOGIES LLC
- Applicant Address: US TX Addison
- Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee: SANDISK TECHNOLOGIES LLC
- Current Assignee Address: US TX Addison
- Agency: The Marbury Law Group PLLC
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L27/1157

Abstract:
A three-dimensional memory device includes an alternating stack of insulating layers and electrically conductive layers located over a substrate, memory openings extending through the alternating stack, memory opening fill structures located within a respective one of the memory openings, and a gate dielectric located between the memory opening fill structures and the electrically conductive layers. Each of the memory opening fill structures includes a vertical semiconductor channel, a conductive core electrode, and a memory film located between the vertical semiconductor channel and the conductive core electrode. The memory film contains a layer stack including a first tunneling dielectric contacting the vertical semiconductor channel, a second tunneling dielectric contacting the conductive core electrode, and a charge storage layer located between the first tunneling dielectric and the second tunneling dielectric.
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