Invention Grant
- Patent Title: Channel orientation of CMOS gate-all-around field-effect transistor devices for enhanced carrier mobility
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Application No.: US16431866Application Date: 2019-06-05
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Publication No.: US10892331B2Publication Date: 2021-01-12
- Inventor: Tenko Yamashita , Myung-Hee Na
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Ryan, Mason & Lewis, LLP
- Agent Robert Sullivan
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/78 ; H01L29/10 ; H01L21/84 ; H01L29/06 ; H01L29/775 ; H01L21/8238 ; H01L29/66

Abstract:
Techniques are provided to fabricate semiconductor integrated circuit devices which include complementary metal-oxide-semiconductor gate-all-around field-effect transistor devices (e.g., nanosheet field-effect transistor devices), wherein the channel orientation layout of N-type and P-type field-effect transistor devices are independently configured to provide enhanced carrier mobility in the channel layers of the different type field-effect transistor devices.
Information query
IPC分类: