High performance single crystal silicon cells and arrays thereof are manufactured using a rapid process flow. Tunneling junctions formed in the process provide performance benefits, such as higher efficiency and a lower power temperature coefficient. The process generates a large array of interconnected high performance cells smaller than typical cells without requiring additional process steps, and simplifies integration of these coupons into the final product. The cells can have different shapes, sizes, and orientations, enabling the array to be flexible in any desired direction. Higher efficiencies and lower hot spotting under shading is achieved by connecting small low current, high voltage cells in dense series and parallel configurations. Low current cells also require much less metallization than typical solar cells and arrays.