Invention Grant
- Patent Title: Method and device for producing a photovoltaic element with stabilised efficiency
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Application No.: US14900004Application Date: 2013-09-26
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Publication No.: US10892376B2Publication Date: 2021-01-12
- Inventor: Axel Herguth , Svenja Wilking
- Applicant: UNIVERSITÄT KONSTANZ
- Applicant Address: DE Constance
- Assignee: UNIVERSITÄT KONSTANZ
- Current Assignee: UNIVERSITÄT KONSTANZ
- Current Assignee Address: DE Constance
- Agency: Mannava & Kang, P.C.
- Priority: DE102013010575 20130626
- International Application: PCT/EP2013/070104 WO 20130926
- International Announcement: WO2014/206504 WO 20141231
- Main IPC: H01L31/18
- IPC: H01L31/18 ; H01L31/068 ; H01L21/677 ; F27B9/40 ; H01L21/67 ; F27B9/06

Abstract:
According to an example, in a method for producing a photovoltaic element with stabilised efficiency, a silicon substrate may be provided with an emitter layer and electrical contacts, which may be subjected to a stabilisation treatment step. Hydrogen from a hydrogenated silicon nitride layer may be introduced into the silicon substrate, for example, within a zone of maximum temperature. The silicon substrate may then be cooled rapidly in a zone in order to avoid hydrogen effusion. The silicon substrate may then be maintained, for example in a zone within a temperature range of from 230° C. to 450° C. for a period of, for example, at least 10 seconds. The previously introduced hydrogen may thereby assume an advantageous bond state. At the same time or subsequently, a regeneration may be carried out by generating excess minority charge carriers in the substrate at a temperature of at least 90° C., preferably at least 230° C.
Public/Granted literature
- US20160141445A1 METHOD AND DEVICE FOR PRODUCING A PHOTOVOLTAIC ELEMENT WITH STABILISED EFFICIENCY Public/Granted day:2016-05-19
Information query
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