Bulk acoustic wave filter device
Abstract:
A bulk acoustic wave filter device includes a substrate including an insulating layer, a resonance portion including a bottom electrode, disposed on the substrate, a piezoelectric layer, disposed above at least a portion of the bottom electrode, and a top electrode disposed above at least a portion of the piezoelectric layer, a wiring portion connected to the resonance portion such that the top electrode or the bottom electrode extends into the wiring portion, a connection electrode connecting the top electrode and the bottom electrode to an external device, and a heat transfer member connecting a portion of at least one of the bottom electrode and the top electrode that is disposed in the wiring portion to the substrate. The resonance portion is provided with a cavity disposed below the bottom electrode, and the heat transfer member is disposed outside of the cavity.
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