Invention Grant
- Patent Title: Bulk acoustic wave filter device
-
Application No.: US16406492Application Date: 2019-05-08
-
Publication No.: US10892731B2Publication Date: 2021-01-12
- Inventor: Jang Ho Park
- Applicant: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRO-MECHANICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: NSIP Law
- Priority: KR10-2018-0127845 20181025
- Main IPC: H03H9/02
- IPC: H03H9/02 ; H03H9/05 ; H03H9/56 ; H03H9/17 ; H03H9/13 ; H03H9/10

Abstract:
A bulk acoustic wave filter device includes a substrate including an insulating layer, a resonance portion including a bottom electrode, disposed on the substrate, a piezoelectric layer, disposed above at least a portion of the bottom electrode, and a top electrode disposed above at least a portion of the piezoelectric layer, a wiring portion connected to the resonance portion such that the top electrode or the bottom electrode extends into the wiring portion, a connection electrode connecting the top electrode and the bottom electrode to an external device, and a heat transfer member connecting a portion of at least one of the bottom electrode and the top electrode that is disposed in the wiring portion to the substrate. The resonance portion is provided with a cavity disposed below the bottom electrode, and the heat transfer member is disposed outside of the cavity.
Information query