Invention Grant
- Patent Title: Composite particles, method of refining and use thereof
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Application No.: US16533067Application Date: 2019-08-06
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Publication No.: US10894906B2Publication Date: 2021-01-19
- Inventor: Hongjun Zhou , John Edward Quincy Hughes , Krishna P. Murella , Reinaldo Mario Machado , Mark Leonard O'Neill , Dnyanesh Chandrakant Tamboli
- Applicant: Versum Materials US, LLC
- Applicant Address: US AZ Tempe
- Assignee: Versum Materials US, LLC
- Current Assignee: Versum Materials US, LLC
- Current Assignee Address: US AZ Tempe
- Agent Lina Yang
- Main IPC: H01L21/463
- IPC: H01L21/463 ; H01L21/461 ; H01L21/321 ; H01L21/3105 ; H01L21/306 ; H01L21/304 ; H01L21/302 ; C09K3/14 ; C09G1/02 ; C09G1/00 ; B24B37/04
Abstract:
Composite particles with lower mean particle size and smaller size distribution are obtained through refining treatments. The refined composite particles, such as ceria coated silica particles are used in Chemical Mechanical Planarization (CMP) compositions to offer higher removal rate; very low within wafer (WWNU) for removal rate, low dishing and low defects for polishing oxide films.
Information query
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