Invention Grant
- Patent Title: Processing method and processing apparatus of metal member
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Application No.: US16287273Application Date: 2019-02-27
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Publication No.: US10895014B2Publication Date: 2021-01-19
- Inventor: Hiroshi Nagaike
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: IPUSA, PLLC
- Priority: JP2018-038041 20180302
- Main IPC: C23C22/82
- IPC: C23C22/82 ; C23C22/06
Abstract:
A method of processing a metal member having a passivation film on its surface is provided. The method includes a step of heating the metal member for a predetermined period at a temperature of 300° C. or higher.
Public/Granted literature
- US20190271085A1 PROCESSING METHOD, PROCESSING APPARATUS, AND EVALUATION METHOD OF METAL MEMBER Public/Granted day:2019-09-05
Information query
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