Dual sensor type mass flow controller
Abstract:
To provide an MFC capable of improving an S/N ratio of a sensor signal even when a pressure difference between both sides of the MFC is small and a flow rate in the sensor flow path is low. Provided is a mass flow controller including a fluid flow path that allows a fluid to pass therethrough, a plurality of flow sensor units that measure a mass flow rate of the fluid, an adjusting valve that adjusts a flow rate of the fluid passing through the fluid flow path, and a control unit that controls a degree of open of the adjusting valve. The flow sensor units are each a thermal flow sensor unit. The control unit calculates a mass flow rate from an added output signal obtained by adding the output signals of the plurality of flow sensor units, and controls the degree of open of the adjusting valve.
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