Invention Grant
- Patent Title: Dual sensor type mass flow controller
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Application No.: US16724675Application Date: 2019-12-23
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Publication No.: US10895482B2Publication Date: 2021-01-19
- Inventor: Takuro Murata , Takeshi Nakamura
- Applicant: FUJIKIN INCORPORATED
- Applicant Address: JP Osaka
- Assignee: FUJIKIN INCORPORATED
- Current Assignee: FUJIKIN INCORPORATED
- Current Assignee Address: JP Osaka
- Agency: Greenblum & Bernstein, P.L.C.
- Priority: JP2018-245026 20181227
- Main IPC: G01F1/78
- IPC: G01F1/78 ; G01F1/708 ; G01F1/80

Abstract:
To provide an MFC capable of improving an S/N ratio of a sensor signal even when a pressure difference between both sides of the MFC is small and a flow rate in the sensor flow path is low. Provided is a mass flow controller including a fluid flow path that allows a fluid to pass therethrough, a plurality of flow sensor units that measure a mass flow rate of the fluid, an adjusting valve that adjusts a flow rate of the fluid passing through the fluid flow path, and a control unit that controls a degree of open of the adjusting valve. The flow sensor units are each a thermal flow sensor unit. The control unit calculates a mass flow rate from an added output signal obtained by adding the output signals of the plurality of flow sensor units, and controls the degree of open of the adjusting valve.
Public/Granted literature
- US20200209033A1 DUAL SENSOR TYPE MASS FLOW CONTROLLER Public/Granted day:2020-07-02
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