Invention Grant
- Patent Title: Semiconductor memory device
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Application No.: US16110106Application Date: 2018-08-23
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Publication No.: US10896914B2Publication Date: 2021-01-19
- Inventor: Takashi Tachikawa , Hidenori Miyagawa
- Applicant: TOSHIBA MEMORY CORPORATION
- Applicant Address: JP Minato-ku
- Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee: TOSHIBA MEMORY CORPORATION
- Current Assignee Address: JP Minato-ku
- Agency: Oblon, McClelland, Maier & Neustadt, L.L.P.
- Priority: JP2018-050724 20180319
- Main IPC: H01L27/11582
- IPC: H01L27/11582 ; H01L29/04 ; H01L23/528

Abstract:
A semiconductor memory device comprises: a substrate; gate electrodes arranged in a first direction crossing a surface of the substrate; a first semiconductor layer including a first portion extending in the first direction and facing the plurality of gate electrodes, and, a second portion nearer to the substrate than the first portion; a gate insulating film provided between the gate electrode and the first portion of the first semiconductor layer, and, including a memory portion; and, a wiring portion provided between the substrate and the plurality of gate electrodes, connected to the second portion of the first semiconductor layer, and, extending in a second direction crossing the first direction. The wiring portion comprises a second semiconductor layer connected to the second portion of the first semiconductor layer. The second semiconductor layer includes a first crystal grain larger than a thickness in the first direction of the second semiconductor layer.
Public/Granted literature
- US20190288059A1 SEMICONDUCTOR MEMORY DEVICE Public/Granted day:2019-09-19
Information query
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