Invention Grant
- Patent Title: Device structure and manufacturing method using HDP deposited source-body implant block
-
Application No.: US15499487Application Date: 2017-04-27
-
Publication No.: US10896968B2Publication Date: 2021-01-19
- Inventor: Anup Bhalla , François Hébert , Sung-Shan Tai , Sik K. Lui
- Applicant: Anup Bhalla , François Hébert , Sung-Shan Tai , Sik K. Lui
- Applicant Address: US CA Santa Clara; US CA San Mateo; US CA San Jose; US CA Sunnyvale
- Assignee: Anup Bhalla,François Hébert,Sung-Shan Tai,Sik K. Lui
- Current Assignee: Anup Bhalla,François Hébert,Sung-Shan Tai,Sik K. Lui
- Current Assignee Address: US CA Santa Clara; US CA San Mateo; US CA San Jose; US CA Sunnyvale
- Agent Bo-In Lin
- Main IPC: H01L29/423
- IPC: H01L29/423 ; H01L29/06 ; H01L29/40

Abstract:
This invention discloses a semiconductor power device. The trenched semiconductor power device includes a trenched gate, opened from a top surface of a semiconductor substrate, surrounded by a source region encompassed in a body region near the top surface above a drain region disposed on a bottom surface of a substrate. The semiconductor power device further includes an implanting-ion block disposed above the top surface on a mesa area next to the body region having a thickness substantially larger than 0.3 micron for blocking body implanting ions and source ions from entering into the substrate under the mesa area whereby masks for manufacturing the semiconductor power device can be reduced.
Public/Granted literature
- US20170288034A1 DEVICE STRUCTURE AND MANUFACTURING METHOD USING HDP DEPOSITED SOURCE-BODY IMPLANT BLOCK Public/Granted day:2017-10-05
Information query
IPC分类: