Far-field optical super-resolution microscopy method
Abstract:
The present invention discloses a far-field optical super-resolution microscopy method, and particularly relates to an optical super-resolution microscopy method for micro-structures on the surface of a sample. The present invention measures the vibration modes of different micro-samples via a laser interference vibrometer, and utilizes different eigen-vibration frequencies of the micro-structures on the surface of the sample to render, under the cooperation of a sub-nanometer two-dimensional displacement scanning translation stage, a high-resolution spatial position, an excitation frequency vibration spectrum and an image pattern, thus realizing super-resolution microscopy imaging. Since the present invention utilizes the different vibration frequencies of the micro-structures on the surface of the sample to perform marking, and adopts a laser to excite and detect the vibration of the micro-structures, the method has the characteristics of causing no mark, no damage and no contamination to the sample.
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