Invention Grant
- Patent Title: Photoacoustic sensor, method for checking a gas-tightness, and system
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Application No.: US16203859Application Date: 2018-11-29
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Publication No.: US10900932B2Publication Date: 2021-01-26
- Inventor: Matthias Eberl , Franz Jost , Stefan Kolb
- Applicant: Infineon Technologies AG
- Applicant Address: DE Neubiberg
- Assignee: Infineon Technologies AG
- Current Assignee: Infineon Technologies AG
- Current Assignee Address: DE Neubiberg
- Agency: Harrity & Harrity, LLP
- Priority: DE102017128526 20171201
- Main IPC: G01N29/24
- IPC: G01N29/24 ; G01N29/32 ; G01N21/17

Abstract:
An example of a system comprises a volume filled with a gas, a gas excitation device configured to excite the gas inside the volume, a microphone configured to output a microphone signal on the basis of the gas excited by the gas excitation device, and a testing unit configured to take the microphone signal as a basis for testing a gas-tightness of the volume. An example of a photoacoustic sensor comprises a hermetically sealed sensor cell, a gas excitation device and a testing unit configured to take the microphone signal dependent on the thermally excited gas as a basis for testing a gas-tightness of the sensor cell. One example comprises a method for testing a gas-tightness of a volume filled with a gas.
Public/Granted literature
- US20190170702A1 PHOTOACOUSTIC SENSOR, METHOD FOR CHECKING A GAS-TIGHTNESS, AND SYSTEM Public/Granted day:2019-06-06
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