Invention Grant
- Patent Title: Division mask
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Application No.: US15700256Application Date: 2017-09-11
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Publication No.: US10901313B2Publication Date: 2021-01-26
- Inventor: Minyoung Kim
- Applicant: SAMSUNG DISPLAY CO., LTD.
- Applicant Address: KR Yongin-si
- Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee: SAMSUNG DISPLAY CO., LTD.
- Current Assignee Address: KR Yongin-si
- Agency: F. Chau & Associates, LLC
- Priority: KR10-2016-0117412 20160912
- Main IPC: G03F1/20
- IPC: G03F1/20 ; H01L27/15 ; C23C14/04 ; H01L51/56 ; B05C21/00
Abstract:
A division mask includes a main body portion including an opening pattern; and a clamping portion disposed at opposite ends of the main body portion. The clamping portion including at least three branch portions. The branch portions have a smaller width in a direction away from a central line of the division mask.
Public/Granted literature
- US20180074394A1 DIVISION MASK Public/Granted day:2018-03-15
Information query
