Invention Grant
- Patent Title: Metrology method and apparatus with increased bandwidth
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Application No.: US16903893Application Date: 2020-06-17
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Publication No.: US10901323B2Publication Date: 2021-01-26
- Inventor: Hugo Augustinus Joseph Cramer , Seyed Iman Mossavat , Paul Christiaan Hinnen
- Applicant: ASML Netherlands B.V.
- Applicant Address: NL Veldhoven
- Assignee: ASML Netherlands B.V.
- Current Assignee: ASML Netherlands B.V.
- Current Assignee Address: NL Veldhoven
- Agency: Sterne, Kessler, Goldstein & Fox P.L.L.C.
- Priority: EP18157680 20180220
- Main IPC: G03F7/20
- IPC: G03F7/20 ; G02B21/10 ; G02B21/36 ; G01N21/27
Abstract:
Disclosed is method of optimizing bandwidth of measurement illumination for a measurement application, and an associated metrology apparatus. The method comprises performing a reference measurement with reference measurement illumination having a reference bandwidth and performing one or more optimization measurements, each of said one or more optimization measurements being performed with measurement illumination having a varied candidate bandwidth. The one or more optimization measurements are compared with the reference measurement; and an optimal bandwidth for the measurement application is selected based on the comparison.
Public/Granted literature
- US20200319562A1 Metrology Method and Apparatus with Increased Bandwidth Public/Granted day:2020-10-08
Information query
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