Invention Grant
- Patent Title: Halogen removal module and associated systems and methods
-
Application No.: US15594118Application Date: 2017-05-12
-
Publication No.: US10903065B2Publication Date: 2021-01-26
- Inventor: Travis R. Taylor , Adam Bateman , Todd A. Lopes , Sankaranarayanan Ravi , Silvia Aguilar , Derek Witkowicki
- Applicant: Lam Research Corporation
- Applicant Address: US CA Fremont
- Assignee: Lam Research Corporation
- Current Assignee: Lam Research Corporation
- Current Assignee Address: US CA Fremont
- Agency: Penilla IP, APC
- Main IPC: H01L21/02
- IPC: H01L21/02 ; H01L21/67 ; H01L21/687
Abstract:
A chamber is formed to enclose a processing region. A passageway is configured to provide for entry of a substrate into the processing region and removal of the substrate from the processing region. A substrate support structure is disposed within the processing region and configured to support the substrate within the processing region. At least one gas input is configured to supply one or more gases to the processing region. At least one gas output is configured to exhaust gases from the processing region. A humidity control device is configured to control a relative humidity within the processing region. At least one heating device is disposed to provide temperature control of the substrate within the processing region. The processing region of the chamber is directly accessible from a substrate handling module configured to operate at atmospheric pressure.
Public/Granted literature
- US20180330942A1 Halogen Removal Module and Associated Systems and Methods Public/Granted day:2018-11-15
Information query
IPC分类:
