Invention Grant
- Patent Title: Cooled reflective adapter plate for a deposition chamber
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Application No.: US16695793Application Date: 2019-11-26
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Publication No.: US10903067B2Publication Date: 2021-01-26
- Inventor: Ashish Goel , Anantha Subramani , Maurice E. Ewert
- Applicant: Applied Materials, Inc.
- Applicant Address: US CA Santa Clara
- Assignee: Applied Materials, Inc.
- Current Assignee: Applied Materials, Inc.
- Current Assignee Address: US CA Santa Clara
- Agency: Patterson + Sheridan LLP
- Main IPC: C23C16/48
- IPC: C23C16/48 ; H01J37/32 ; H01L21/02 ; C23C14/54 ; H01L21/67
Abstract:
In one embodiment, an adapter plate for a deposition chamber is provided. The adapter plate comprises a body, a mounting plate centrally located on the body, a first annular portion extending longitudinally from a first surface of the mounting plate and disposed radially inward from an outer surface of the mounting plate, a second annular portion extending longitudinally from an opposing second surface of the mounting plate and disposed radially inward from the outer surface of the mounting plate, and a mirror-finished surface disposed on the interior of the second annular portion, the mirror-finished surface having an average surface roughness of 6 Ra or less.
Public/Granted literature
- US20200098559A1 COOLED REFLECTIVE ADAPTER PLATE FOR A DEPOSITION CHAMBER Public/Granted day:2020-03-26
Information query
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