Invention Grant
- Patent Title: Radio frequency switches with air gap structures
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Application No.: US16575675Application Date: 2019-09-19
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Publication No.: US10903316B2Publication Date: 2021-01-26
- Inventor: Anthony K. Stamper , Steven M. Shank , John J. Ellis-Monaghan , Siva P. Adusumilli
- Applicant: GLOBALFOUNDRIES INC.
- Applicant Address: KY Grand Cayman
- Assignee: GLOBALFOUNDRIES INC.
- Current Assignee: GLOBALFOUNDRIES INC.
- Current Assignee Address: KY Grand Cayman
- Agency: Robests Calderon Safran & Cole, P.C.
- Agent Anthony Canale; Andrew M. Calderon
- Main IPC: H01L21/764
- IPC: H01L21/764 ; H01L29/06 ; H01L23/66 ; H01L29/10 ; H01L29/78 ; H01L21/762
Abstract:
The present disclosure relates to semiconductor structures and, more particularly, to radio frequency (RF) switches with airgap structures and methods of manufacture. The structure includes a substrate with at least one airgap structure formed in a well region under at least one gate structure, and which extends to a junction formed by a source/drain region of the at least one gate structure.
Public/Granted literature
- US20200013855A1 RADIO FREQUENCY SWITCHES WITH AIR GAP STRUCTURES Public/Granted day:2020-01-09
Information query
IPC分类:
