Invention Grant
- Patent Title: Plasma generator
-
Application No.: US16494261Application Date: 2018-03-14
-
Publication No.: US10904995B2Publication Date: 2021-01-26
- Inventor: Stefan Nettesheim , Dominik Burger , Florian Hoppenthaler , Michael Weilguni , Markus Puff , Pavol Kudela
- Applicant: TDK Electronics AG , relyon plasma GmbH
- Applicant Address: DE Munich; DE Regensburg
- Assignee: TDK Electronics AG,relyon plasma GmbH
- Current Assignee: TDK Electronics AG,relyon plasma GmbH
- Current Assignee Address: DE Munich; DE Regensburg
- Agency: Slater Matsil, LLP
- Priority: DE102017105410 20170314
- International Application: PCT/EP2018/056418 WO 20180314
- International Announcement: WO2018/167159 WO 20180920
- Main IPC: H01L41/04
- IPC: H01L41/04 ; H05H1/24 ; H01L41/09 ; H01L41/107

Abstract:
A plasma generator is disclosed. In an embodiment a plasma generator includes a piezoelectric transformer subdivided into an input region and an output region in a longitudinal direction, wherein the piezoelectric transformer comprises an output-side end face facing away from the input region, wherein the plasma generator comprises a passive load arranged permanently in front of the output-side end face, and wherein the plasma generator is configured to generate non-thermal atmospheric-pressure plasma.
Information query
IPC分类: