Invention Grant
- Patent Title: Pseudo-conductive high-electron mobility transistors and microelectronic sensors based on them
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Application No.: US16122032Application Date: 2018-09-05
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Publication No.: US10905346B2Publication Date: 2021-02-02
- Inventor: Ayal Ram
- Applicant: EPITRONIC HOLDINGS PTE LTD.
- Applicant Address: SG Singapore
- Assignee: EPITRONIC HOLDINGS PTE LTD.
- Current Assignee: EPITRONIC HOLDINGS PTE LTD.
- Current Assignee Address: SG Singapore
- Agency: The Roy Gross Law Firm, LLC
- Agent Roy Gross
- Main IPC: H01L29/778
- IPC: H01L29/778 ; A61B5/04 ; A61B5/0408 ; H01L29/205 ; H01L29/20 ; A61B5/00 ; A61B5/0452 ; A61B3/16 ; A61B1/273 ; A61B5/0478 ; A61B7/04 ; G01N27/414 ; A61B5/08 ; A61B5/11 ; A61B5/021 ; A61B5/05

Abstract:
In some embodiments, an open-gate pseudo-conductive high-electron mobility transistor (PC-HEMT) includes a multilayer hetero-junction structure made of III-V single-crystalline or polycrystalline semiconductor materials. This structure includes at least one buffer layer and a barrier layer, and is deposited on a substrate layer. The PC-HEMT further includes a two-dimensional electron gas (2DEG) or two-dimensional hole gas (2DHG) conducting channel formed at the interface between the buffer layer and the barrier layer, source and drain contacts, either ohmic or non-ohmic, connected to the 2DEG or 2DHG conducting channel, electrical metallizations for connecting the PC-HEMT to an electric circuit, and an open gate area between the source and drain contacts. Some embodiments use non-ohmic contacts, have thickness of the top (buffer or barrier) layer in the open gate area in the range of 5-9 nm, which corresponds to the pseudo-conducting current range between normally-on and normally-off operation mode of the transistor, and have the roughness of the surface barrier layer in the range of about 0.2 nm or less.
Public/Granted literature
- US20190021622A1 PSEUDO-CONDUCTIVE HIGH-ELECTRON MOBILITY TRANSISTORS AND MICROELECTRONIC SENSORS BASED ON THEM Public/Granted day:2019-01-24
Information query
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