Invention Grant
- Patent Title: Liquid-sensing apparatus and method of manufacturing the same
-
Application No.: US16197372Application Date: 2018-11-21
-
Publication No.: US10908113B2Publication Date: 2021-02-02
- Inventor: Jui-Chin Chen , Wen Wang , Pei-Jer Tzeng
- Applicant: Industrial Technology Research Institute
- Applicant Address: TW Hsinchu
- Assignee: Industrial Technology Research Institute
- Current Assignee: Industrial Technology Research Institute
- Current Assignee Address: TW Hsinchu
- Agency: JCIPRNET
- Priority: TW107134668A 20181001
- Main IPC: G01N27/40
- IPC: G01N27/40 ; G01N27/30 ; G01N27/416 ; G01N27/413 ; G01N27/407 ; H01L21/3213

Abstract:
A liquid-sensing apparatus includes a substrate, partitions, and independent sensors. The partitions are disposed on the substrate for separating several housing spaces in order to respectively house a to-be-detected liquid, wherein each of the housing spaces has a bottom, a closed sidewall, and an open top, and thus the to-be-detected liquid may be dripped from the top of the housing space. The independent sensors are respectively formed at the bottom of different housing spaces, wherein the independent sensors respectively include different sensing material layers, and surfaces of the different sensing material layers have nanoholes.
Information query