Invention Grant
- Patent Title: Probe card case and probe card transfer method
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Application No.: US15428371Application Date: 2017-02-09
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Publication No.: US10908180B2Publication Date: 2021-02-02
- Inventor: Chikaomi Mori , Takashi Amemiya
- Applicant: Japan Electronic Materials Corp.
- Applicant Address: JP Hyogo
- Assignee: Japan Electronic Materials Corp.
- Current Assignee: Japan Electronic Materials Corp.
- Current Assignee Address: JP Hyogo
- Agency: Abelman, Frayne & Schwab
- Priority: JP2012-256209 20121122
- Main IPC: G01R1/04
- IPC: G01R1/04 ; G01R31/28 ; G01R1/073

Abstract:
Disclosed is a probe card ease for accommodating a probe card. The probe card case includes: a first case member configured to mount the probe card at a predetermined position therein; a second case member configured to be fitted to a top side of the first case member, and including a card fixing mechanism for fixing the probe card; and a case fixing mechanism configured to fix the first case member and the second case member. The probe card is capable of being transferred in a state where the probe card is accommodated in the probe card case and the first case member and the second case member are fixed, and the probe card is capable of being transferred only with the second case member in a state where the probe card is fixed to the second case member.
Public/Granted literature
- US20170153272A1 PROBE CARD CASE AND PROBE CARD TRANSFER METHOD Public/Granted day:2017-06-01
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