Photolithography process and photolithography apparatus
Abstract:
A photolithography process includes providing a first test layout including test patterns, and a first light source; forming an initial mask layout according to the first test layout; forming a mask layout including mask layout patterns through an optical proximity correction or a phase-shifting masking; forming exposed patterns by exposing the mask layout using the first light source; and determining a weak region from the first test layout. A first distance between adjacent test patterns in the weak region is unequal to a second distance between corresponding exposed patterns. The photolithography process further includes performing a re-layout on the weak region to increase the first distance, thereby providing an adjusted test layout; performing a light-source optimization to obtain an adjusted light source; and determining the adjusted test layout and the adjusted light source as a second test layout and a second light source, respectively when process window requirements are satisfied.
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