Invention Grant

Inspection device
Abstract:
An imaging part 120 receives the light that is reflected from the measurement target, and a plurality of pieces of pattern image data are generated. Height data is generated on the basis of the plurality of pieces of the pattern image data. Green light, blue light, and red light are successively emitted from the light sources 111 to 113, and are reflected from the pattern generating part 118, and uniform light of the green light, uniform light of the blue light, and uniform light of the red light are successively projected onto the measurement target. The imaging part 120 receives the uniform light reflected by the measurement target, and a plurality of pieces of texture image data are successively generated. The plurality of pieces of the texture image data are synthesized, whereby color texture image data is generated.
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