Invention Grant
- Patent Title: Particle detection assembly, system and method
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Application No.: US16356539Application Date: 2019-03-18
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Publication No.: US10910193B2Publication Date: 2021-02-02
- Inventor: Eli Cheifetz , Amit Weingarten , Semyon Shopman , Silviu Reinhorn , Dmitry Shur
- Applicant: EL-MUL TECHNOLOGIES LTD.
- Applicant Address: IL Rehovot
- Assignee: EL-MUL TECHNOLOGIES LTD.
- Current Assignee: EL-MUL TECHNOLOGIES LTD.
- Current Assignee Address: IL Rehovot
- Agency: Alphapatent Associates, Ltd
- Agent Daniel J. Swirsky
- Main IPC: H01J37/244
- IPC: H01J37/244 ; H01J37/22 ; H01J37/26

Abstract:
An electron detector assembly configured for detecting electrons emitted from a sample irradiated by an electron beam, including a scintillator configured with a scintillator layer formed with a scintillating surface. The scintillator layer emits light signals corresponding to impingement of electrons upon the scintillating surface. A light guide plate is coupled to the scintillator layer and includes a peripheral surface. One or more silicon photomultiplier devices are positioned upon the peripheral surface, wherein one or more silicon photomultiplier devices are arranged perpendicularly or obliquely relative to the scintillating surface. The silicon photomultiplier device is configured to yield an electrical signal from an electron impinging upon the scintillator surface.
Public/Granted literature
- US20190259571A1 PARTICLE DETECTION ASSEMBLY, SYSTEM AND METHOD Public/Granted day:2019-08-22
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