Invention Grant
- Patent Title: Mode-switching plasma systems and methods of operating thereof
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Application No.: US16521340Application Date: 2019-07-24
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Publication No.: US10910196B1Publication Date: 2021-02-02
- Inventor: Peter Ventzek , Alok Ranjan , Mitsunori Ohata , Michael Hummel
- Applicant: Tokyo Electron Limited
- Applicant Address: JP Tokyo
- Assignee: Tokyo Electron Limited
- Current Assignee: Tokyo Electron Limited
- Current Assignee Address: JP Tokyo
- Agency: Slater Matsil, LLP
- Main IPC: H01J37/32
- IPC: H01J37/32 ; H01L21/02 ; H01L21/3213

Abstract:
In one embodiment, a plasma processing system includes a plasma processing chamber, a substrate holder disposed in the plasma processing chamber, a coil disposed over the plasma processing chamber, and a plurality of taps configured to contact the coil at an associated contact region. The plasma processing system is configured to sustain a plasma by selecting a subset of taps from the plurality of taps to apply a power source and a reference potential.
Public/Granted literature
- US20210027991A1 MODE-SWITCHING PLASMA SYSTEMS AND METHODS OF OPERATING THEREOF Public/Granted day:2021-01-28
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