Invention Grant
- Patent Title: Method of controlling an adjustable nozzle and method of making a semiconductor device
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Application No.: US15948379Application Date: 2018-04-09
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Publication No.: US10910199B2Publication Date: 2021-02-02
- Inventor: Wei-Ching Wu , Wen-Long Lee , Ding-I Liu
- Applicant: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Applicant Address: TW Hsinchu
- Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee: TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
- Current Assignee Address: TW Hsinchu
- Agency: Hauptman Ham, LLP
- Main IPC: C23C16/52
- IPC: C23C16/52 ; H01J37/32 ; C23C16/455

Abstract:
A method of controlling a position of an adjustable nozzle includes depositing a film on a surface of a wafer. The method includes measuring a thickness profile of the surface of the wafer. The method includes comparing the measurement of the thickness profile with a reference value using a control unit. The method includes transmitting a control signal to the adjustable nozzle to alter the position of the adjustable nozzle based on the result of the comparison. The adjustable nozzle includes a base having a hollow center portion for conducting gas, the base configured for connection to a gas source. The adjust nozzle includes a tip coupled to the base and having an opening for conducting gas from the base to the exterior of the nozzle, wherein the base is configured for pivoting about a longitudinal axis of the base in response to the control signal.
Public/Granted literature
- US20180226224A1 METHOD OF CONTROLLING AN ADJUSTABLE NOZZLE AND METHOD OF MAKING A SEMICONDUCTOR DEVICE Public/Granted day:2018-08-09
Information query
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