Invention Grant
- Patent Title: Plasma sensing device, plasma monitoring system and method of controlling plasma processes
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Application No.: US16366225Application Date: 2019-03-27
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Publication No.: US10910202B2Publication Date: 2021-02-02
- Inventor: Hun-Yong Park , Sang-Woo Bae , Seul-Gi Lee , Won-Don Joo
- Applicant: SAMSUNG ELECTRONICS CO., LTD.
- Applicant Address: KR Suwon-si
- Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee: SAMSUNG ELECTRONICS CO., LTD.
- Current Assignee Address: KR Suwon-si
- Agency: Lee IP Law, P.C.
- Priority: KR10-2018-0107314 20180907
- Main IPC: G01N21/47
- IPC: G01N21/47 ; H01J37/32 ; G01N21/68

Abstract:
A plasma monitoring system includes a plasma chamber performing plasma processes, first and second plasma sensing devices, and a controller. The first and second plasma sensing devices are respectively in a first horizontal direction and a second horizontal direction perpendicular to each other from a center point of a monitoring plasma plane in the plasma chamber. The first and second plasma sensing device generate first and second detection signals with respect to the monitoring plasma plane based on a first incident beam radiated from the monitoring plasma plane in the first horizontal direction and a second incident beam radiated from the monitoring plasma plane in the second horizontal direction. The controller detects two-dimensional plasma distribution information with respect to the monitoring plasma plane by performing a convolution operation based on the first and second detection signals, and controls the plasma processes based on the two-dimensional plasma distribution information.
Public/Granted literature
- US20200083030A1 PLASMA SENSING DEVICE, PLASMA MONITORING SYSTEM AND METHOD OF CONTROLLING PLASMA PROCESSES Public/Granted day:2020-03-12
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