Invention Grant
- Patent Title: Methods for separating bonded wafer structures
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Application No.: US16296456Application Date: 2019-03-08
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Publication No.: US10910280B2Publication Date: 2021-02-02
- Inventor: Justin Scott Kayser , John Francis Valley , James Dean Eoff
- Applicant: GlobalWafers Co., Ltd.
- Applicant Address: TW Hsinchu
- Assignee: GlobalWafers Co., Ltd.
- Current Assignee: GlobalWafers Co., Ltd.
- Current Assignee Address: TW Hsinchu
- Agency: Armstrong Teasdale LLP
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L21/78 ; H01L21/67 ; H01L21/762 ; B28D5/00 ; B32B43/00

Abstract:
Cleave systems for separating bonded wafer structures, mountable cleave monitoring systems and methods for separating bonded wafer structures are disclosed. In some embodiments, the sound emitted from a bonded wafer structure is sensed during cleaving and a metric related to an attribute of the cleave is generated. The generated metric may be used for quality control and/or to adjust a cleave control parameter to improve the quality of the cleave of subsequently cleaved bonded wafer structures.
Public/Granted literature
- US20190206745A1 METHODS FOR SEPARATING BONDED WAFER STRUCTURES Public/Granted day:2019-07-04
Information query
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