Invention Grant
- Patent Title: Prevention of charging damage in full-depletion devices
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Application No.: US15926181Application Date: 2018-03-20
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Publication No.: US10910282B2Publication Date: 2021-02-02
- Inventor: Terence B. Hook
- Applicant: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Applicant Address: US NY Armonk
- Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee: INTERNATIONAL BUSINESS MACHINES CORPORATION
- Current Assignee Address: US NY Armonk
- Agency: Tutunjian & Bitetto, P.C.
- Agent Robert Sullivan
- Main IPC: H01L21/66
- IPC: H01L21/66 ; H01L23/66 ; H01L21/84 ; H01L27/02 ; H01L23/60 ; G06F30/398 ; H01L29/66

Abstract:
Methods for checking a semiconductor device for compliance with a rule include determining one or more device type categories to which a semiconductor device in a chip layout belongs based on which of a gate, a source/drain region, and a well of the semiconductor device are connected to each other or to a substrate. It is determined whether the semiconductor device complies with a first design rule that considers antenna area connected to the gate and the source/drain region of the semiconductor device. It is determined whether the semiconductor device complies with a second design rule that considers antenna area connected to the well and the source/drain region of the semiconductor device. The chip layout is modified to bring the non-compliant semiconductor device into compliance with the first and second design rules.
Public/Granted literature
- US20180211892A1 PREVENTION OF CHARGING DAMAGE IN FULL-DEPLETION DEVICES Public/Granted day:2018-07-26
Information query
IPC分类: