Prevention of charging damage in full-depletion devices
Abstract:
Methods for checking a semiconductor device for compliance with a rule include determining one or more device type categories to which a semiconductor device in a chip layout belongs based on which of a gate, a source/drain region, and a well of the semiconductor device are connected to each other or to a substrate. It is determined whether the semiconductor device complies with a first design rule that considers antenna area connected to the gate and the source/drain region of the semiconductor device. It is determined whether the semiconductor device complies with a second design rule that considers antenna area connected to the well and the source/drain region of the semiconductor device. The chip layout is modified to bring the non-compliant semiconductor device into compliance with the first and second design rules.
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