Invention Grant
- Patent Title: Semiconductor device having asymmetric fin-shaped pattern
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Application No.: US16794029Application Date: 2020-02-18
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Publication No.: US10910373B2Publication Date: 2021-02-02
- Inventor: Jung-Gun You , Se-wan Park , Baik-Min Sung , Bo-Cheol Jeong
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2015-0007315 20150115
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L21/8234 ; H01L29/78 ; H01L29/06 ; H01L29/66

Abstract:
Semiconductor devices are provided including a first fin-shaped pattern having first and second sidewalls facing one another and a field insulating film contacting at least a portion of the first fin-shaped pattern. The first fin-shaped pattern includes a lower portion of the first fin-shaped pattern contacting the field insulating film; an upper portion of the first fin-shaped pattern not contacting the field insulating film; a first boundary between the lower portion of the first fin-shaped pattern and the upper portion of the first fin-shaped pattern; and a first fin center line perpendicular to the first boundary and meeting the top of the upper portion of the first fin-shaped pattern. The first sidewall of the upper portion of the first fin-shaped pattern and the second sidewall of the upper portion of the first fin-shaped pattern are asymmetric with respect to the first fin center line.
Public/Granted literature
- US20200185382A1 SEMICONDUCTOR DEVICE HAVING ASYMMETRIC FIN-SHAPED PATTERN Public/Granted day:2020-06-11
Information query
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