Invention Grant
- Patent Title: Semiconductor device
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Application No.: US16926360Application Date: 2020-07-10
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Publication No.: US10910374B2Publication Date: 2021-02-02
- Inventor: Sung Min Kim , Dong Won Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Muir Patent Law, PLLC
- Priority: KR10-2018-0041385 20180410
- Main IPC: H01L27/088
- IPC: H01L27/088 ; H01L29/78 ; H01L29/10 ; H01L21/8234 ; H01L21/768 ; H01L29/66

Abstract:
A semiconductor device is provided, which includes a first and second multichannel active patterns spaced apart from one another and extending in a first direction. The semiconductor device also includes first and second gate structures on the first and second multichannel active patterns, extending in a second direction and including first and second gate insulating films, respectively. Sidewalls of the first multichannel active pattern include first portions in contact with the first gate insulating film, second portions not in contact with the first gate insulating film, third portions in contact with the second gate insulating film, and fourth portions not in contact with the second gate insulating film. Additionally, a height of the first portions of the first multichannel active pattern is greater than a height of the third portions of the first multichannel active pattern.
Public/Granted literature
- US20200343243A1 SEMICONDUCTOR DEVICE Public/Granted day:2020-10-29
Information query
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