Invention Grant
- Patent Title: Semiconductor storage device
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Application No.: US16518030Application Date: 2019-07-22
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Publication No.: US10910388B2Publication Date: 2021-02-02
- Inventor: Natsuki Fukuda , Satoshi Nagashima , Tetsu Morooka , Noritaka Ishihara
- Applicant: Toshiba Memory Corporation
- Applicant Address: JP Tokyo
- Assignee: Toshiba Memory Corporation
- Current Assignee: Toshiba Memory Corporation
- Current Assignee Address: JP Tokyo
- Agency: Foley & Lardner LLP
- Priority: JP2019-043121 20190308
- Main IPC: H01L27/11524
- IPC: H01L27/11524 ; H01L27/11556 ; H01L27/1157 ; H01L27/11582 ; H01L29/06 ; H01L21/311 ; H01L21/764 ; H01L21/28

Abstract:
According to one embodiment, a semiconductor storage device includes a first charge storage part, a first insulating part, a second charge storage part, a second insulating part, a first select transistor, and a hollow part. The first charge storage part is at a first position separated from a surface of a substrate by a first distance in a third direction. The first select transistor is at a second position separated from the surface of the substrate by a second distance in the third direction. The second distance is greater than the first distance. The hollow part is up to a third position in the third direction separated from the surface of the substrate by a third distance in the third direction. The third distance is greater than or equal to the first distance and shorter than or equal to the second distance.
Public/Granted literature
- US20200286902A1 SEMICONDUCTOR STORAGE DEVICE Public/Granted day:2020-09-10
Information query
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