Invention Grant
- Patent Title: Three-dimensional semiconductor memory devices
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Application No.: US16444716Application Date: 2019-06-18
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Publication No.: US10910396B2Publication Date: 2021-02-02
- Inventor: Junhyoung Kim , Geunwon Lim , Kwang-soo Kim
- Applicant: Samsung Electronics Co., Ltd.
- Applicant Address: KR Suwon-si
- Assignee: Samsung Electronics Co., Ltd.
- Current Assignee: Samsung Electronics Co., Ltd.
- Current Assignee Address: KR Suwon-si
- Agency: Harness, Dickey and Pierce, P.L.C.
- Priority: KR10-2018-0161076 20181213
- Main IPC: H01L27/11575
- IPC: H01L27/11575 ; H01L23/522 ; H01L27/11565 ; H01L27/11582

Abstract:
A three-dimensional semiconductor memory device includes a plurality of first insulating layers vertically stacked on a peripheral logic structure, second insulating layers stacked alternately with the first insulating layers, conductive layers stacked alternately with the first insulating layers and disposed on sidewalls of the second insulating layers, through-interconnections penetrating the first insulating layers and the second insulating layers so as to be connected to the peripheral logic structure, and a first conductive line electrically connected to a plurality of first conductive layers of the conductive layers.
Information query
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