Invention Grant
- Patent Title: Method and structure for forming vertical transistors with various gate lengths
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Application No.: US16600701Application Date: 2019-10-14
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Publication No.: US10910494B2Publication Date: 2021-02-02
- Inventor: Kangguo Cheng , Shogo Mochizuki , Choonghyun Lee , Juntao Li
- Applicant: International Business Machines Corporation
- Applicant Address: US NY Armonk
- Assignee: International Business Machines Corporation
- Current Assignee: International Business Machines Corporation
- Current Assignee Address: US NY Armonk
- Agency: Fleit Intellectual Property Law
- Agent Jose Gutman
- Main IPC: H01L29/78
- IPC: H01L29/78 ; H01L29/66 ; H01L27/088 ; H01L29/08 ; H01L21/8234 ; H01L21/306 ; H01L29/10 ; H01L29/06 ; H01L21/02 ; H01L21/3065

Abstract:
Various methods and structures for fabricating a plurality of vertical fin FETs on the same semiconductor substrate in which a first gate length of a first gate in a first vertical fin FET is less than a second gate length of a second gate in a second vertical fin FET. A difference in gate lengths between different vertical fin FETs can be precisely fabricated by using atomic layer silicon germanium epitaxy. Gate length offset is formed at a bottom source/drain junction region of each vertical fin FET transistor, which allows downstream processing for all vertical fin FET transistors to be the same.
Public/Granted literature
- US20200052114A1 METHOD AND STRUCTURE FOR FORMING VERTICAL TRANSISTORS WITH VARIOUS GATE LENGTHS Public/Granted day:2020-02-13
Information query
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