- Patent Title: Surface acoustic wave device and method of manufacturing the same
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Application No.: US15701545Application Date: 2017-09-12
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Publication No.: US10910546B2Publication Date: 2021-02-02
- Inventor: Tetsuya Kimura
- Applicant: Murata Manufacturing Co., Ltd.
- Applicant Address: JP Nagaokakyo
- Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee: Murata Manufacturing Co., Ltd.
- Current Assignee Address: JP Nagaokakyo
- Agency: Keating & Bennett, LLP
- Priority: JP2015-099763 20150515
- Main IPC: H01L41/047
- IPC: H01L41/047 ; H03H9/02 ; H01L41/053 ; H01L41/277 ; H03H9/145

Abstract:
An end-surface-reflection surface acoustic wave device, which reflects a surface acoustic wave between first and second end surfaces facing each other, includes a support substrate, an intermediate layer, a piezoelectric layer, and an IDT electrode. The first end surface is located at one end portion in a surface-acoustic-wave propagation direction and extends from a main surface of the piezoelectric layer to at least a portion of the intermediate layer. The second end surface is located at the other end portion in the surface-acoustic-wave propagation direction and extends from the main surface of the piezoelectric layer to at least a portion of the intermediate layer. The support substrate includes support substrate portions that are located outside the first and second end surfaces in the surface-acoustic-wave propagation direction.
Public/Granted literature
- US20170373241A1 SURFACE ACOUSTIC WAVE DEVICE AND METHOD OF MANUFACTURING THE SAME Public/Granted day:2017-12-28
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