Invention Grant
- Patent Title: Piezoelectric thin film resonator, filter, and multiplexer
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Application No.: US15835057Application Date: 2017-12-07
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Publication No.: US10910547B2Publication Date: 2021-02-02
- Inventor: Tokihiro Nishihara , Jiansong Liu , Tsuyoshi Yokoyama , Shinji Taniguchi
- Applicant: TAIYO YUDEN CO., LTD.
- Applicant Address: JP Tokyo
- Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee: TAIYO YUDEN CO., LTD.
- Current Assignee Address: JP Tokyo
- Agency: Chen Yoshimura LLP
- Priority: JP2016-248347 20161221
- Main IPC: H01L41/47
- IPC: H01L41/47 ; H03H9/17 ; H01L41/047 ; H01L41/08 ; H03H9/54 ; H03H9/58 ; H03H9/02 ; H03H9/60 ; H03H9/70

Abstract:
A piezoelectric thin film resonator includes: a piezoelectric film located on a substrate; lower and upper electrodes facing each other across a part of the piezoelectric film; and an insertion film located between the lower and upper electrodes, located in a part of an outer peripheral region within a resonance region where the lower and upper electrodes face each other across the piezoelectric film, and not located in a center region of the resonance region, a first width in the resonance region of the insertion film in a first region, where the upper electrode is extracted from the resonance region, being greater than a third width in the resonance region in a third region other than a second region, where the lower electrode is extracted from the resonance region, and the first region, a second width in the resonance region in a second region being the third width or greater.
Public/Granted literature
- US20180175275A1 PIEZOELECTRIC THIN FILM RESONATOR, FILTER, AND MULTIPLEXER Public/Granted day:2018-06-21
Information query
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