Invention Grant
- Patent Title: Piezoelectric rotational MEMS resonator
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Application No.: US15988607Application Date: 2018-05-24
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Publication No.: US10910549B2Publication Date: 2021-02-02
- Inventor: Heikki Kuisma
- Applicant: MURATA MANUFACTURING CO., LTD.
- Applicant Address: JP Nagaokakyo
- Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee: MURATA MANUFACTURING CO., LTD.
- Current Assignee Address: JP Nagaokakyo
- Agency: Squire Patton Boggs (US) LLP
- Priority: FI20175467 20170524
- Main IPC: H01L41/113
- IPC: H01L41/113 ; G01C19/5642 ; H01L41/09 ; G01C19/5712 ; G01C19/5747 ; G01P15/125 ; G01P15/08 ; H03H9/02 ; H03H9/24

Abstract:
This disclosure reveals a resonator where at least one suspended inertial mass is driven into rotational oscillation by a piezoelectric drive transducer, or where the rotational motion of at least one suspended inertial mass is sensed by a piezoelectric sense transducer. The disclosure is based on the idea of suspending the inertial mass with a one-sided suspender arrangement, where only one suspender is attached to each anchor point, and on the optimal positioning of the suspender in relation to the effective center of gravity of the resonator. The resonator may be employed in a resonator system, a clock oscillator or a gyroscope.
Public/Granted literature
- US20180342667A1 PIEZOELECTRIC ROTATIONAL MEMS RESONATOR Public/Granted day:2018-11-29
Information query
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